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A computational investigation of the effects of varying discharge geometry for an inductively coupled plasma

✍ Scribed by Christlieb, A.J.; Hitchon, W.N.G.; Keiter, E.R.

Book ID: 114559134
Publisher: IEEE
Year: 2000
Tongue: English
Weight: 352 KB
Volume: 28
Category: Article
ISSN: 0093-3813
DOI: 10.1109/27.902250

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