✦ LIBER ✦
A comprehensive structural analysis of silicon carbide layers grown by vacuum epitaxy on silicon from hydrides and hydrocarbons
✍ Scribed by L. K. Orlov; Yu. N. Drozdov; M. N. Drozdov; O. A. Pod’yacheva; V. I. Vdovin
- Publisher
- SP MAIK Nauka/Interperiodica
- Year
- 2010
- Tongue
- English
- Weight
- 280 KB
- Volume
- 51
- Category
- Article
- ISSN
- 0022-4766
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