✦ LIBER ✦
A comparison of Ti films sputtered in an N2/Ar plasma at 25 and 500°C
✍ Scribed by J.A. Fair; M. Delfino
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 463 KB
- Volume
- 53
- Category
- Article
- ISSN
- 0169-4332
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