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A comparison of the performance and reliability of wet-etched and dry-etched a-Si:H TFTs

✍ Scribed by GadelRab, S.M.; Miri, A.M.; Chamberlain, S.G.

Book ID: 114537145
Publisher: IEEE
Year: 1998
Tongue: English
Weight: 192 KB
Volume: 45
Category: Article
ISSN: 0018-9383
DOI: 10.1109/16.658694

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