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A comparison of techniques for improving linewidth control over steps

✍ Scribed by Dietrich Meyerhofer

Book ID: 103597827
Publisher: Elsevier Science
Year: 1985
Tongue: English
Weight: 469 KB
Volume: 3
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(85)90046-2

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