A comparison of principal component analysis, multiway principal component analysis, trilinear decomposition and parallel factor analysis for fault detection in a semiconductor etch process

✍ Scribed by Barry M. Wise; Neal B. Gallagher; Stephanie Watts Butler; Daniel D. White Jr; Gabriel G. Barna

• Publisher: John Wiley and Sons
• Year: 1999
• Tongue: English
• Weight: 252 KB
• Volume: 13
• Category: Article
• ISSN: 0886-9383
• DOI: 10.1002/(sici)1099-128x(199905/08)13:3/4<379::aid-cem556>3.0.co;2-n