✦ LIBER ✦

A comparison of MOS processes for VLSI. Part I: H. E. Oldham and S. L. Partridge Solid St. Technol. 177 (June 1984)

Book ID: 104157243
Publisher: Elsevier Science
Year: 1985
Tongue: English
Weight: 86 KB
Volume: 16
Category: Article
ISSN: 0026-2692
DOI: 10.1016/s0026-2692(85)80019-7

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✦ Synopsis

Only those semiconductor manufacturers who aspire toward "world class" cleanliness and manufacturing productivity will avoid impending yield catastrophes.

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