✦ LIBER ✦
A comparison of cryopump and diffusion pump performance on MMA 29 × 45 ft vacuum chamber: R C Muhlenhaupt, J Vac Sci Technol, 20, (4), 1982, 1005–1009
- Publisher
- Elsevier Science
- Year
- 1983
- Tongue
- English
- Weight
- 176 KB
- Volume
- 33
- Category
- Article
- ISSN
- 0042-207X
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