✦ LIBER ✦
A comparison between SIMS and spreading resistance profiles for ion implanted arsenic and boron after heat treatments in an inert ambient
✍ Scribed by DJ Godfrey; RD Groves; MG Dowsett; AFW Willoughby
- Book ID
- 103889056
- Publisher
- Elsevier Science
- Year
- 1985
- Weight
- 287 KB
- Volume
- 129
- Category
- Article
- ISSN
- 0378-4363
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