A Comparative Study of MEMS Microactuators for Use in a Dual-Stage Servo With an Instrumented Suspension

✍ Scribed by Xinghui Huang; Horowitz, R.; Yunfeng Li

• Book ID: 117924095
• Publisher: IEEE
• Year: 2006
• Tongue: English
• Weight: 386 KB
• Volume: 11
• Category: Article
• ISSN: 1083-4435
• DOI: 10.1109/tmech.2006.882982