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A compact package for integrated silicon thermal gas flow meters

✍ Scribed by P. Bruschi; V. Nurra; M. Piotto

Book ID: 106185384
Publisher: Springer-Verlag
Year: 2008
Tongue: English
Weight: 531 KB
Volume: 14
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s00542-007-0490-2

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