✦ LIBER ✦
A compact new-concept ellipsometer for accurate large scale thin film measurements
✍ Scribed by Koops, Richard; Sonin, Petro; van Veghel, Marijn; El Gawhary, Omar
- Book ID
- 123613177
- Publisher
- Institute of Physics
- Year
- 2014
- Tongue
- English
- Weight
- 858 KB
- Volume
- 16
- Category
- Article
- ISSN
- 2040-8978
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