✦ LIBER ✦
A compact ion source using a hollow cathode discharge and its application to thin film formation
✍ Scribed by M. Takeuchi; K. Yanagida; H. Nagasaka; T. Tanabe; H. Mase
- Publisher
- Elsevier Science
- Year
- 1986
- Tongue
- English
- Weight
- 350 KB
- Volume
- 144
- Category
- Article
- ISSN
- 0040-6090
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