A compact integrated band-pass filter on a low-dielectric constant polyimide dry film
✍ Scribed by Ohk-Kun Lim; Joon-Ik Lee; Yong-Jun Kim; Jae-Yeong Park
- Book ID
- 102516658
- Publisher
- John Wiley and Sons
- Year
- 2003
- Tongue
- English
- Weight
- 133 KB
- Volume
- 40
- Category
- Article
- ISSN
- 0895-2477
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✦ Synopsis
Abstract
A new compact integrated tapped‐line combline filter, with metal‐insulator‐metal (MIM)‐type capacitive loads, is designed and fabricated using newly proposed micromachining techniques that employ a polyimide dry film as a dielectric layer. For increased uniformity of thickness, a dry‐film fabrication process is developed. The presented filter is realized with a relatively small size, 3.68 by 4.53 mm, on a polyimide dry film and shows up to 50% size reduction as compared with a general quarter‐wavelength filter. © 2004 Wiley Periodicals, Inc. Microwave Opt Technol Lett 40: 177–179, 2004; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.11321