✦ LIBER ✦
A combined MW/ECR-PACVD apparatus for the deposition of diamond and other hard coatings
✍ Scribed by H. Buchkremer-Hermanns; H. Ren; H. Weiß
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 444 KB
- Volume
- 74-75
- Category
- Article
- ISSN
- 0257-8972
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