A combined molecular dynamics and kinetic Monte Carlo calculation to study sputter erosion and beam assisted deposition

✍ Scribed by G Betz; W Husinsky

• Book ID: 114165926
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 251 KB
• Volume: 193
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(02)00804-2