✦ LIBER ✦
A CMOS integrated three-axis accelerometer fabricated with commercial submicrometer CMOS technology and bulk-micromachining
✍ Scribed by Takao, H.; Fukumoto, H.; Ishida, M.
- Book ID
- 114538818
- Publisher
- IEEE
- Year
- 2001
- Tongue
- English
- Weight
- 221 KB
- Volume
- 48
- Category
- Article
- ISSN
- 0018-9383
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