Design, fabrication and testing of a nov
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Zachary J. Davis; Winnie Svendsen; Anja Boisen
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Article
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2007
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Elsevier Science
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English
โ 624 KB
Micro-and nanoelectromechanical systems (MEMS/NEMS) have a high potential for mass sensing application. By miniaturization of the dimensions, higher and higher sensitivities can be achieved. Here we are presenting finite element modelling and optimization of a free-free beam type mechanical resonato