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A chemically amplified calix[4]arene-based electron-beam resist

✍ Scribed by H. Sailer; A. Ruderisch; D.P. Kern; V. Schurig

Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 309 KB
Volume: 73-74
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2004.02.045

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