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A capacitance meter

โœ Scribed by E. V. Aleksenko; N. K. Sharuev; T. A. Filimonova


Publisher
Springer US
Year
1990
Tongue
English
Weight
170 KB
Volume
33
Category
Article
ISSN
0543-1972

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An implementation of a low pressure meter based on a capacitive micro sensor is exposed in this paper. In the first part, we presented the analysed sensor's structure and the developed theoretical model that permits to simulate the variation of its capacitance under applied absolute pressure. Keepin