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A calibrator based on the use of low-coherent light source straightness interferometer and compensation method

✍ Scribed by Lin, Shyh-Tsong; Yeh, Sheng-Lih; Chiu, Chi-Shang; Huang, Mou-Shan

Book ID
115414484
Publisher
Optical Society of America
Year
2011
Tongue
English
Weight
796 KB
Volume
19
Category
Article
ISSN
1094-4087

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