3D Calibration of a Scanning Force Micro
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Bienias, M.; Gao, S.; Hasche, K.; Seemann, R.; Thiele, K.
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Article
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1997
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John Wiley and Sons
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English
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A commercial metrological scanning force microscope (SFM) has been modiรed to further improve its metrological performance and calibration. For this purpose, a three-dimensional (3D) measuring system consisting of three miniature laser interferometers has been incorporated into the SFM. Special att