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A calibrated atomic force microscope using an orthogonal scanner and a calibrated laser interferometer

โœ Scribed by Dong-Yeon Lee; Dong-Min Kim; Dae-Gab Gweon; Jinwon Park


Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
798 KB
Volume
253
Category
Article
ISSN
0169-4332

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A commercial metrological scanning force microscope (SFM) has been modiรed to further improve its metrological performance and calibration. For this purpose, a three-dimensional (3D) measuring system consisting of three miniature laser interferometers has been incorporated into the SFM. Special att