A bounded-error approach to accuracy analysis in ellipsometry

✍ Scribed by M.K. Smit; J.W. Verhoof

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 539 KB
• Volume: 32
• Category: Article
• ISSN: 0378-4754
• DOI: 10.1016/0378-4754(90)90010-g

✦ Synopsis

A nonlinear Bounded-Error Estimation method is applied to the case of ellipsometric measurement of film properties. It is shown that this method can be used with advantage for estimating the magnitude of the measurement errors including systematic errors.