✦ LIBER ✦
A Ballistic Transport and Surface Reaction Model for Simulating Atomic Layer Deposition Processes in High-Aspect-Ratio Nanopores
✍ Scribed by Raymond A. Adomaitis
- Publisher
- John Wiley and Sons
- Year
- 2011
- Tongue
- English
- Weight
- 570 KB
- Volume
- 17
- Category
- Article
- ISSN
- 0948-1907
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