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A 2-dimensional RBS simulation program for studying the edges of multilayer integrated circuit components

✍ Scribed by X.S. Guo; W.A. Lanford; K.P. Rodbell


Book ID
113281212
Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
258 KB
Volume
45
Category
Article
ISSN
0168-583X

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