✦ LIBER ✦
A 1-D Capacitive Micromachined Ultrasonic Transducer Imaging Array Fabricated With a Silicon-Nitride-Based Fusion Process
✍ Scribed by Logan, A.S.; Wong, L.L.P.; Yeow, J.T.W.
- Book ID
- 114655709
- Publisher
- IEEE
- Year
- 2011
- Tongue
- English
- Weight
- 490 KB
- Volume
- 16
- Category
- Article
- ISSN
- 1083-4435
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