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976. Sputter-deposition procedure: Int Business Mach Corp,Brit Patent 1,056,060, Patent Abstr, 7 (7a) part 6A, 9th Feb 1967, 1


Publisher
Elsevier Science
Year
1967
Tongue
English
Weight
140 KB
Volume
17
Category
Article
ISSN
0042-207X

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