✦ LIBER ✦
970. Problems encountered in the preparation of thin films by cathodic sputtering at pressure below 10−3 torr: F Gaydou,Le Vide, 21 (126), Nov–Dec 1966, 454–458 (in French)
- Publisher
- Elsevier Science
- Year
- 1967
- Tongue
- English
- Weight
- 151 KB
- Volume
- 17
- Category
- Article
- ISSN
- 0042-207X
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