963. Theoretical analysis of a two-pump vacuum system: B F R Kendall,J Vac Sci Technol, 5 (2), March–April 1968 45–48

• Publisher: Elsevier Science
• Year: 1968
• Tongue: English
• Weight: 184 KB
• Volume: 18
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(68)90738-0