✦ LIBER ✦
928. The effect of magnetic fields on substrate temperature and film texture in an rf sputtering system: E L Paradis,J Vac Sci Technol, 11 (6), 1974, 1170–1176
- Publisher
- Elsevier Science
- Year
- 1975
- Tongue
- English
- Weight
- 176 KB
- Volume
- 25
- Category
- Article
- ISSN
- 0042-207X
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