✦ LIBER ✦
917. Changes in properties of Si-SiO2 interface at medium energy ion bombardment: E I Zorin et al, Microelectronics, Coll, No 6. Sov Radio Moscow 1973, 122–128 (in Russian)
- Publisher
- Elsevier Science
- Year
- 1974
- Tongue
- English
- Weight
- 159 KB
- Volume
- 24
- Category
- Article
- ISSN
- 0042-207X
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