897. Possibility of monitoring vapour-gas mixtures in the chloride process of preparation of silicon autoepitaxial films using the method of piezoquartz microbalance with sorbing layer: A I Buturlin et al, Coll Scient Works Microelectronics Problems, No 8, Moscow Inst Electron Technol, 1972, 184–192 (in Russian)

• Publisher: Elsevier Science
• Year: 1973
• Tongue: English
• Weight: 166 KB
• Volume: 23
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(73)90709-4