834. Method for vacuum deposition of refractory metal films: J.L. Nicholson, Rev. Sci. Instrum., 34 (1), Jan. 1963, 118

• Publisher: Elsevier Science
• Year: 1963
• Tongue: English
• Weight: 100 KB
• Volume: 13
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(63)91121-7