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828. Growth of epitaxial silicon layers by vacuum evaporation. I. Experimental procedure and initial assessment: B.A. Unvala and G.R. Booker, Phil. Mag., 9 (100), April 1964, 691–701


Publisher
Elsevier Science
Year
1964
Tongue
English
Weight
104 KB
Volume
14
Category
Article
ISSN
0042-207X

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