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820. Rotary slide valve vacuum pump: Balzers Vakuum GmbH, German patent 1,257,349, Patent abstr, 8 (5) part b, 7th Feb 1968, 2.


Publisher
Elsevier Science
Year
1968
Tongue
English
Weight
167 KB
Volume
18
Category
Article
ISSN
0042-207X

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