✦ LIBER ✦
816. High vacuum coating plant for evaporation of semiconductor materials: J Kostak and Z Krcal, Feingerätetechnik, 15 (7), 1966, 327–333 (in German)
- Publisher
- Elsevier Science
- Year
- 1967
- Tongue
- English
- Weight
- 128 KB
- Volume
- 17
- Category
- Article
- ISSN
- 0042-207X
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