7695. Monitoring of thin film sputtering by soft X-ray emission spectroscopy: Y Claesson et al,Vacuum, 41, 1990, 1275–1278

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 111 KB
• Volume: 42
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(91)91763-e