✦ LIBER ✦
764. Effects of nitrogen, methane and oxygen on structure and electrical properties of thin tantalum films: D. Gerstenberg and C.J. Calbick, J. Appl. Phys., 35(2), Feb. 1964, 402–407
- Publisher
- Elsevier Science
- Year
- 1964
- Tongue
- English
- Weight
- 94 KB
- Volume
- 14
- Category
- Article
- ISSN
- 0042-207X
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