✦ LIBER ✦
7629. Development of a chlorofluorocarbon/oxygen reactive ion etching chemistry for fine-line tungsten patterning: T H Daubenspeck and P C Sukanek, J Vac Sci Technol, B8, 1990, 586–595
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 155 KB
- Volume
- 42
- Category
- Article
- ISSN
- 0042-207X
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