7571. Industrial aspects of silicon molecular beam epitaxy: H Kibbel and E Kasper,Vacuum,41, 1990, 929–932

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 143 KB
• Volume: 42
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(91)91639-6