✦ LIBER ✦
7554. Defect productio and annealing due to high-energy ion implantation —I. Silicon: T A Belykh et al,Nucl Instrum Meth Phys,B51, 1990, 242–246
- Book ID
- 103475758
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 153 KB
- Volume
- 42
- Category
- Article
- ISSN
- 0042-207X
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