✦ LIBER ✦
7515. Infrared absorption analysis of films deposited by glow-discharge of silane/helium mixtures: M T Gutiérrez et al,J Appl Phys, 67, 1990, 7031–7033
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 156 KB
- Volume
- 42
- Category
- Article
- ISSN
- 0042-207X
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