✦ LIBER ✦
7499. Oxide growth on silicon using a microwave electron cyclotron resonance oxygen plasma: G T Salbet et al, 23. J Vac Sci Technol, A8, 1990, 2919–2923
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 147 KB
- Volume
- 42
- Category
- Article
- ISSN
- 0042-207X
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