✦ LIBER ✦
7498. Distributed electron cyclotron resonance in silicon processing: epitaxy and etching: R R Burke et al,J Vac Sci Technol, A8, 1990, 2931–2938
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 147 KB
- Volume
- 42
- Category
- Article
- ISSN
- 0042-207X
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