✦ LIBER ✦
7488. Target magnetic-field effects on deposition rate in rf magnetron sputtering: A Furuya and S Hirono,J Appl Phys, 68, 1990, 304–310
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 151 KB
- Volume
- 42
- Category
- Article
- ISSN
- 0042-207X
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