7465. Magnetron sputtering deposited AIN waveguides: effect of the structure on optical properties: A Cachard et al,Vacuum, 41, 1990, 1151–1153

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 158 KB
• Volume: 42
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(91)91533-t