7462. Thin film sputter deposition for hybrid applications: P Muralt and J P Seidel, Vacuum, 41, 1990, 1400–1402

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 141 KB
• Volume: 42
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(91)91530-2