✦ LIBER ✦
7433. A trace gas mass spectrometer for on-line monitoring of sputter processes at 10−2 mbar without pressure reduction: N Müller et al, J Vac Sci Technol, A8, 1990, 2822–2825
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 157 KB
- Volume
- 42
- Category
- Article
- ISSN
- 0042-207X
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