7430. Controllable leaks using electrically pulsed valves: J L Dobson and B R F Kendall, J Vac Sci Technol, A8, 1990, 2790–2794

• Book ID: 103474654
• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 110 KB
• Volume: 42
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(91)91498-d