✦ LIBER ✦
7429. Reliability of turbomolecular vacuum pumps: a comparison of rolling element and magnetic bearing systems: M Heldner and H-P Kabelitz, J Vac Sci Technol, A8, 1990, 2772–2777
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 110 KB
- Volume
- 42
- Category
- Article
- ISSN
- 0042-207X
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